Systems and methods for bonding semiconductor elements

ABSTRACT

A method of ultrasonically bonding semiconductor elements includes the steps of: (a) aligning surfaces of a plurality of first conductive structures of a first semiconductor element to respective surfaces of a plurality of second conductive structures of a second semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation-in-part application of application Ser. No. 15/147,015, filed May 5, 2016, now U.S. Pat. No. 9,633,981, which is a divisional application of application Ser. No. 14/822,164, filed Aug. 10, 2015, now U.S. Pat. No. 9,362,247, which is a continuation application of application Ser. No. 14/505,609 filed Oct. 3, 2014, now U.S. Pat. No. 9,136,240, which claims the benefit of Provisional Application No. 61/888,203, filed Oct. 8, 2013, the content of each of which is incorporated herein by reference.

FIELD

The invention relates to the formation of semiconductor packages, and more particularly, to improved systems and methods for bonding semiconductor elements together.

BACKGROUND

Traditional semiconductor packaging typically involves die attach processes and wire bonding processes. Advanced semiconductor packaging technologies (e.g., flip chip bonding, thermo-compression bonding, etc.) technologies are gaining more traction in this industry. For example, in thermo-compression bonding, heat and pressure are used to form a plurality of interconnections between semiconductor elements.

While advanced packaging technologies are increasingly utilized there are many limitations in these technologies including, for example, limitations related to the relative infancy of some advanced packaging technologies. Thus, it would be desirable to provide improved systems for, and methods of, bonding semiconductor elements together.

SUMMARY

According to an exemplary embodiment of the invention, a method of ultrasonically bonding semiconductor elements is provided. The method includes the steps of: (a) aligning surfaces of a plurality of first conductive structures of a first semiconductor element to respective surfaces of a plurality of second conductive structures of a second semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures.

According to another exemplary embodiment of the invention, a bonding system is provided. The bonding system includes a support structure for supporting a first semiconductor element, the first semiconductor element including a plurality of first conductive structures. The bonding system also includes a bonding tool for carrying a second semiconductor element including a plurality of second conductive structures, and for applying ultrasonic energy to the second semiconductor element to form tack bonds between ones of the plurality of second conductive structures and corresponding ones of the plurality of first conductive structures.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention is best understood from the following detailed description when read in connection with the accompanying drawings. It is emphasized that, according to common practice, the various features of the drawings are not to scale. On the contrary, the dimensions of the various features are arbitrarily expanded or reduced for clarity. Included in the drawings are the following figures:

FIGS. 1A-1C are block diagram views of portions of an ultrasonic bonding machine illustrating a structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with an exemplary embodiment of the invention;

FIG. 2A is a block diagram view of portions of an ultrasonic bonding machine illustrating a structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with another exemplary embodiment of the invention;

FIG. 2B is an enlarged view of portion “FIG. 2B” of FIG. 2A;

FIG. 2C is a view of FIG. 2B after ultrasonic bonding;

FIG. 3 is a block diagram view of portions of an ultrasonic bonding machine illustrating a structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with yet another exemplary embodiment of the invention;

FIG. 4A is a block diagram view of portions of an ultrasonic bonding machine illustrating a structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with another exemplary embodiment of the invention;

FIG. 4B is an enlarged view of portion “FIG. 4B” of FIG. 4A;

FIG. 4C is a view of FIG. 4B after ultrasonic bonding;

FIG. 5A is a block diagram view of portions of an ultrasonic bonding machine illustrating a structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with another exemplary embodiment of the invention;

FIG. 5B is an enlarged view of portion “FIG. 5B” of FIG. 5A;

FIG. 5C is a view of FIG. 5B after ultrasonic bonding;

FIG. 6A is a block diagram view of portions of an ultrasonic bonding machine illustrating a structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with yet another exemplary embodiment of the invention;

FIG. 6B is an enlarged view of portion of “FIG. 6B” of FIG. 6A;

FIG. 6C is a view of a portion of FIG. 6A after contact between conductive structures;

FIG. 7 is a flow diagram illustrating a method of ultrasonically bonding semiconductor elements in accordance with an exemplary embodiment of the invention;

FIGS. 8A-8E are block diagram views of portions of ultrasonic bonding machines illustrating a structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with an exemplary embodiment of the invention;

FIG. 9 is a flow diagram illustrating a method of ultrasonically bonding semiconductor elements in accordance with an exemplary embodiment of the invention;

FIGS. 10A-10E are block diagram views of portions of an ultrasonic bonding machine illustrating another structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with another exemplary embodiment of the invention;

FIG. 11 is a flow diagram illustrating yet another method of ultrasonically bonding semiconductor elements in accordance with yet another exemplary embodiment of the invention;

FIGS. 12A-12D are block diagram views of portions of an ultrasonic bonding machine illustrating yet another structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with yet another exemplary embodiment of the invention;

FIG. 13 is a flow diagram illustrating yet another method of ultrasonically bonding semiconductor elements in accordance with yet another exemplary embodiment of the invention;

FIGS. 14A-14D are block diagram views of portions of an ultrasonic bonding machine illustrating yet another structure and method of bonding an upper semiconductor element to a lower semiconductor element in accordance with yet another exemplary embodiment of the invention; and

FIG. 15 is a flow diagram illustrating yet another method of ultrasonically bonding semiconductor elements in accordance with yet another exemplary embodiment of the invention.

DETAILED DESCRIPTION

As used herein, the term “semiconductor element” is intended to refer to any structure including (or configured to include at a later step) a semiconductor chip or die. Exemplary semiconductor elements include a bare semiconductor die, a semiconductor die on a substrate (e.g., a leadframe, a PCB, a carrier, etc.), a packaged semiconductor device, a flip chip semiconductor device, a die embedded in a substrate, a stack of semiconductor die, amongst others. Further, the semiconductor element may include an element configured to be bonded or otherwise included in a semiconductor package (e.g., a spacer to be bonded in a stacked die configuration, a substrate, etc.).

In accordance with certain exemplary embodiments of the invention, inventive techniques (and structures) are provided for assembling a semiconductor device such as a package on package (i.e., PoP) structure. For example, a plurality of semiconductor elements (which may be packages) may be arranged in a stacked configuration. Each of the elements desirably includes aluminum (or aluminum alloy, or partially aluminum) conductive structures that are ultrasonically bonded together. Such a technique has certain advantages including, for example: a reduced density compared to other interconnection techniques (e.g., solder based PoP techniques); no solder mass reflow utilized in contrast to other interconnection techniques; and room temperature ultrasonic bonding enabled in certain applications through the use of an aluminum to aluminum interconnect.

FIG. 1A illustrates portions of ultrasonic bonding machine 100, including bonding tool 124 and support structure 150. As will be appreciated by those skilled in the art, a thermo-compression bonding machine (such as machine 100, or any of the other machine embodiments described herein) may include many elements not shown in the drawings herein for simplicity. Exemplary elements includes, for example: input elements for providing input workpieces to be bonded with additional semiconductor elements; output elements for receiving processed workpieces that now include additional semiconductor elements; transport systems for moving workpieces; imaging systems for imaging and alignment of workpieces; a bond head assembly carrying the bonding tool; a motion system for moving the bond head assembly; a computer system including software for operating the machine; amongst other elements.

Referring again to FIG. 1A, upper semiconductor element 108 is retained (e.g., by vacuum, such as through vacuum ports defined by the holding surface of holding portion 110) by holding portion 110 of bonding tool 124. Upper semiconductor element 108 includes upper conductive structures 112 a, 112 b on a lower surface thereof. Lower semiconductor element 160 includes semiconductor die 102 bonded to (or otherwise supported by) substrate 104. Lower conductive structures 106 a, 106 b are provided on an upper surface of lower semiconductor die 102. Substrate 104 in turn is supported by support structure 150 (e.g., a heat block of machine 100, an anvil of machine 100, or any other desired support structure). In the configuration shown in FIG. 1A (preparing for bonding), each of upper conductive structures 112 a, 112 b are generally aligned with opposing respective lower conductive structures 106 a, 106 b. Semiconductor element 108 is moved downward through the motion of bonding tool 124 (as shown by the arrows 126 in FIG. 1A). Following this motion, FIG. 1B illustrates contact between the respective conductive structures 106 a, 112 a and 106 b, 112 b. Ultrasonic energy 114 is applied to upper semiconductor element 108 and upper conductive structures 112 a, 112 b through bonding tool 124 using an ultrasonic transducer (not shown but indicated in the drawings as “USG”, that is, ultrasonic generator). For example, an ultrasonic transducer that carries bonding tool 124 may in turn be carried by a bond head assembly of machine 100.

During the ultrasonic bonding, lower conductive structures 106 a, 106 b may be held relatively stationary through the support of lower semiconductor element 160 by support structure 150 (e.g., a support surface of support structure 150 may include one or more vacuum ports to secure substrate 104 to support structure 150 during bonding). Ultrasonic energy 114 (along with optional bond force and/or heat) may cause partial deformation of the conductive structures. For example, conductive structures 106 a, 106 b and 112 a, 112 b are illustrated as being partially deformed in FIG. 1C. Ultrasonic bonds are formed between respective pairs of conductive structures in FIG. 1C. For example, ultrasonic bond 128 a is formed between deformed conductive structures 112 a′/106 a′, and ultrasonic bond 128 b is formed between deformed conductive structures 112 b′/106 b′. Conductive structures 106 a, 106 b; 112 a, 112 b may be formed of aluminum, or aluminum alloys, or may contain aluminum at their bond surfaces, etc.

The respective pairs of conductive elements 106 a, 112 a; 106 b, 112 b may be bonded together at room temperature (without heat being added during the bonding process). Optionally, additional heat may be applied, for example, to: (1) upper semiconductor element 108 through bonding tool 124, thus heating upper conductive elements 112 a, 112 b during the bonding process; and/or (2) lower semiconductor element 160 through support structure 150 (e.g., heat block 150), thus heating lower conductive structures 106 a, 106 b during the bonding process. Such optional heating (e.g., through the bond tool and/or the support structure, etc.) is applicable to any of the embodiments of the invention illustrated and described herein.

Semiconductor elements 160 and 108 illustrated in FIGS. 1A-1C may be any of a number of semiconductor elements configured to be bonded together. In one very specific example (which may also be applied to the other embodiments illustrated and described herein) semiconductor element 160 is a processor (e.g., a mobile phone processor which may also be known as an APU (application processor unit)) and semiconductor element 108 is a memory device configured to be bonded to the processor as shown in FIGS. 1A-1C.

The conductive structures (i.e., 112 a, 112 b, 106 a, 106 b) shown in FIGS. 1A-1C are illustrated as generic structures. These structures may take many different forms such as conductive pillars, stud bumps (e.g., formed using a stud bumping machine), electroplated conductive structures, sputtered conductive structures, wire portions, bond pads, contact pads, among many others. Various of the other drawings provided herein illustrate specific examples of such structures. In accordance with certain embodiments of the invention the conductive structures include aluminum at the contact region (i.e., the bonding surface) where they will be bonded to another conductive structure. In such embodiments, the conductive structures may be formed of aluminum, or an aluminum alloy (e.g., aluminum alloyed with copper, aluminum alloyed with silicon and copper, etc.). In other examples, the conductive structures may include a base conductive material other than aluminum (e.g., copper) with aluminum (or aluminum alloy) at the contact region. Throughout the application, if a conductive structure is referred to as being “aluminum” it is understood that the structure may be aluminum, may be an aluminum alloy, or may include aluminum (or an aluminum alloy) at a contact region of such conductive structure.

FIG. 2A illustrates portions of ultrasonic bonding machine 200, including bonding tool 224 and support structure 250. Upper semiconductor element 208 is retained (e.g., by vacuum) by holding portion 210 of bonding tool 224, and includes upper conductive structures 222 a, 222 b (i.e., conductive aluminum pads 222 a, 222 b) provided at a lower surface thereof. Lower semiconductor element 260 includes semiconductor die 202 bonded to (or otherwise supported by) substrate 204. Lower conductive structures 206 a, 206 b are provided on an upper surface of lower semiconductor die 202. Substrate 204 in turn is supported by support structure 250. In the configuration shown in FIG. 2A, each of upper conductive structures 222 a, 222 b are generally aligned with (and configured to be ultrasonically bonded to) opposing respective lower conductive structures 206 a, 206 b. Lower conductive structure 206 a includes copper (Cu) pillar 230 provided on an upper surface of lower semiconductor die 202, and an upper aluminum contact structure 216 on an upper surface of Cu pillar 230. Upper aluminum contact structure 216 may be, for example, electroplated or sputtered onto the upper surface of lower copper pillar 230. FIG. 2B is an enlarged view of portion “B” of FIG. 2A and illustrates the top of lower conductive structure 206 a at contact with upper conductive element 222 a.

Ultrasonic energy is applied to upper semiconductor element 208 through bonding tool 224 using an ultrasonic transducer (not shown). Ultrasonic energy may cause partial deformation of the conductive structures as illustrated in FIG. 2C. That is, ultrasonic bond 228 is formed between deformed upper conductive structure 222 a′ and deformed contact structure 216′ (as illustrated in FIG. 2C).

As will be appreciated by those skilled in the art, Cu pillar 230 (including electroplated or sputtered aluminum contact structure/portion 216) is just one example of a conductive structure including aluminum. FIG. 2A also illustrates another exemplary conductive structure 206 b. Lower conductive structure 206 b is an aluminum structure (or aluminum alloy structure) such as a portion of aluminum wire (that may be bonded using a wire bonding process), an aluminum pillar, etc.

FIG. 3 illustrates portions of ultrasonic bonding machine 300, including bonding tool 324 and support structure 350. Upper semiconductor element 308 is retained (e.g., by vacuum) by holding portion 310 of bonding tool 324, and includes upper conductive structures 322 a, 322 b (i.e, conductive aluminum pads 322 a, 322 b). FIG. 3 illustrates the bonding of a packaged semiconductor device 360 (i.e., lower semiconductor element 360) to upper semiconductor element 308. Lower semiconductor element 360 includes semiconductor die 302 bonded to (or otherwise supported by) substrate 304. Lower conductive structures 306 a, 306 b are provided on an upper surface of substrate 304. Substrate 304 in turn is supported by support structure 350. Wire loops 320 a, 320 b are bonded between semiconductor die 302 and substrate 304 (while not shown in FIG. 3, die 302 may be flip chip bonded to substrate 304 as opposed to, or in addition to, the wire loop interconnections). A coating/encapsulation 334 (such as a epoxy molding compound) has been applied over die 302 and wire loops 320 a, 320 b. As illustrated, the upper portions of lower conductive structures 306 a, 306 b are exposed above coating/encapsulation 334 to permit electrical connection to upper semiconductor element 308.

In the configuration shown in FIG. 3, each of upper conductive structures 322 a, 322 b are generally aligned with (and configured to be ultrasonically bonded to) opposing respective lower conductive structures 306 a, 306 b. As illustrated in FIG. 3, each of lower conductive structures 306 a, 306 b includes a respective Cu pillar 330 a, 330 b on an upper surface of substrate 304, and a respective upper aluminum contact structure 316 a, 316 b on an upper surface of Cu pillars 330 a, 330 b. Upper aluminum contact structures 316 a, 316 b may be electroplated or sputtered onto the respective upper surfaces of Cu pillars 330 a, 330 b. As shown, semiconductor element 308 has been moved downward through the motion of bonding tool 324 (as shown by the arrows in FIG. 3) so that FIG. 3 illustrates contact between conductive structures 306 a, 322 a and 306 b, 322 b. Ultrasonic energy (with optional heat and/or bond force) is applied to upper semiconductor element 308 (e.g., through bonding tool 324) using an ultrasonic transducer to form ultrasonic bonds between aluminum conductive structures 322 a, 322 b and respective aluminum contact structures 316 a, 316 b.

FIG. 4A illustrates portions of ultrasonic bonding machine 400, including bonding tool 424 and support structure 450. Upper semiconductor element 408 is retained (e.g., by vacuum) by holding portion 410 of bonding tool 424, and includes upper conductive structures 412 a, 412 b (i.e., e.g., sputtered aluminum bumps, aluminum stud bumps, etc.) on a lower surface thereof. Lower semiconductor element 460 includes semiconductor die 402 bonded to (or otherwise supported by) support structure 404 (e.g., an FR4 support structure). Lower conductive structures 406 a, 406 b (i.e., e.g., sputtered aluminum bumps, aluminum stud bumps, etc.) are provided on an upper surface of lower semiconductor die 402. Substrate 404 in turn is supported by support structure 450. In the configuration shown in FIG. 4A, each of upper conductive structures 412 a, 412 b are generally aligned with (and configured to be ultrasonically bonded to) opposing respective lower conductive structures 406 a, 406 b. A detail of structures 412 a, 406 a (before ultrasonic bonding) is shown in FIG. 4B. Referring again to FIG. 4A, semiconductor element 408 has been moved downward through the motion of bonding tool 424 (as shown by the arrows in FIG. 4A) so that contact is shown between conductive structures 406 a, 412 a and 406 b, 412 b. Ultrasonic energy 414 (with optional heat and/or bond force) is applied to upper semiconductor element 408 (e.g., through bonding tool 424) using an ultrasonic transducer to form ultrasonic bonds 428 a, 428 b between deformed upper aluminum conductive structures and respective deformed lower aluminum contact structures (see, e.g., completed ultrasonic bond 428 a′ formed between deformed structure 412 a′ and deformed structure 406 a′ as illustrated in FIG. 4C).

FIG. 5A illustrates portions of ultrasonic bonding machine 500, including bonding tool 524 and support structure 550. Upper semiconductor element 508 retained (e.g., by vacuum) by holding portion 510 of bonding tool 524, and includes upper conductive structures 522 a, 522 b (i.e, conductive aluminum pads 522 a, 522 b). Lower semiconductor element 560 includes semiconductor die 502 bonded to (or otherwise supported by) substrate 504 (e.g., an FR4 support structure). Lower conductive structures 506 a, 506 b (i.e., e.g., sputtered aluminum bumps, aluminum stud bumps, etc.) are provided on an upper surface of lower semiconductor die 502. Substrate 504 in turn is supported by support structure 550. In the configuration shown in FIG. 5A, each of upper conductive structures 522 a, 522 b are generally aligned with (and configured to be ultrasonically bonded to) opposing respective lower conductive structures 506 a, 506 b. A detail of structures 522 a, 506 a (before ultrasonic bonding) is shown in FIG. 5B. As shown, semiconductor element 508 has been moved downward through the motion of bonding tool 524 (as shown by the arrows in FIG. 5A) so that FIG. 5A illustrates contact between conductive structures 506 a, 522 a. Ultrasonic energy (with optional heat and/or bond force) is applied to upper semiconductor element 508 (e.g., through bonding tool 424) using an ultrasonic transducer to form ultrasonic bonds 528 a, 528 b between deformed upper aluminum conductive structures and respective deformed lower aluminum contact structures (see, e.g., completed ultrasonic bond 528 a′ formed between deformed structure 522 a′ and deformed structure 506 a′ as illustrated in FIG. 5C).

FIG. 6A illustrates the ultrasonic bonding machine 600, including bonding tool 624 and support structure 650. In FIG. 6, a plurality of semiconductor elements have been bonded together in a stacked configuration, in accordance with the teachings of the invention. Specifically, semiconductor element 660 a includes semiconductor die 602 a bonded to (or otherwise supported by) substrate 604 a, where conductive structures 606 a, 606 b (i.e., e.g., sputtered aluminum bumps, aluminum stud bumps, etc.) are provided on an upper surface of semiconductor die 602 a. Semiconductor element 660 a is supported by support structure 650.

Another semiconductor element 660 b (including a corresponding semiconductor die 602 b bonded to, or otherwise supported by, substrate 604 b—and including conductive structures 612 a, 612 b on substrate 604 b) has been previously been bonded to semiconductor element 660 a. More specifically, bonding tool 624 previously bonded (e.g., ultrasonically bonded) element 660 b to element 660 a such that ultrasonic bonds 628 a, 628 b were formed between respective pairs of aluminum conductive structures 612 a, 606 a and 612 b, 606 b. Element 660 b also includes conductive structures 606 a′, 606 b′ which have been bonded to conductive structures of element 660 c in a step described below. FIG. 6B illustrates a detailed view of ultrasonic bond 628 a including deformed conductive structures 612 a, 606 a.

Likewise, another semiconductor element 660 c (including a corresponding semiconductor die 602 c bonded to, or otherwise supported by, substrate 604 c—and including conductive structures 612 a′, 612 b′ on substrate 604 c) has been previously been bonded to semiconductor element 660 b. More specifically, bonding tool 624 previously bonded (e.g., ultrasonically bonded) element 660 c to element 660 b such that ultrasonic bonds 628 a′, 628 b′ were formed between respective pairs of aluminum conductive structures 612 a′, 606 a′ and 612 b′, 606 b′. Element 660 c also includes conductive structures 606 a″, 606 b″ which will be bonded to conductive structures of element 660 d in a step described below.

As shown in FIG. 6A, upper semiconductor element 660 d is retained (e.g., by vacuum) by holding portion 610 of bonding tool 624, and includes semiconductor die 602 d bonded to (or otherwise supported by) substrate 604 d. Conductive structures 612 a″, 612 b″ (i.e., e.g., sputtered aluminum bumps, aluminum stud bumps, etc.) are provided on a lower surface of substrate 604 d. Conductive structures 612 a″, 612 b″ are generally aligned with (and configured to be ultrasonically bonded to) opposing respective conductive structures 606 a″, 606 b″. Semiconductor element 660 d is moved downward through the motion of bonding tool 624 (as shown by the arrows in FIG. 6A). Following this downward motion, contact will occur between respective pairs of conductive structures 612 a″, 606 a″ and 612 b″, 606 b″ (see, e.g., the FIG. 6C detailed view of contact between structures 612 a″, 606 a″ prior to deformation through ultrasonic bonding). Ultrasonic energy is applied to upper semiconductor element 604 d through bonding tool 624 using an ultrasonic transducer (not shown) to form the ultrasonic bonds between respective pairs of conductive structures 612 a″, 606 a″ and 612 b″, 606 b″.

While specific exemplary upper and lower aluminum conductive structures have been illustrated, one skilled in the art would understand that a variety of shapes and designs of upper and lower aluminum conductive structures are permissible within the teachings of the invention.

FIG. 7 is a flow diagram illustrating a method of bonding semiconductor elements together in accordance with an exemplary embodiment of the invention. As is understood by those skilled in the art, certain steps included in the flow diagram may be omitted; certain additional steps may be added; and the order of the steps may be altered from the order illustrated. At Step 700, a first semiconductor element (e.g., including a semiconductor die on a substrate) is supported on a support structure of a bonding machine. The first semiconductor element (e.g., an upper surface of the semiconductor structure) includes a plurality of first conductive structures that are at least partially comprised of aluminum (see, e.g., structures 106 a, 106 b of element 160 in FIG. 1A; structures 206 a, 206 b of element 260 in FIG. 2A; structures 306 a, 306 b of element 360 in FIG. 3A; structures 406 a, 406 b of element 460 in FIG. 4A; structures 506 a, 506 b of element 560 in FIG. 5A; and structures 606 a″, 606 b″ of element 660 c in FIG. 6A). At Step 702, a second semiconductor element is retained by a holding portion of a bonding tool of the bonding machine (see, e.g., elements 108, 208, 308, 408, 508, and 660 d in the corresponding figures). The second semiconductor element includes a plurality of second conductive structures (e.g., on a lower surface of the second semiconductor element) that are at least partially comprised of aluminum. At Step 704, the first conductive structures and the second conductive structures are aligned with one another (see, e.g., FIGS. 1A and 6A) and are then brought into contact with one another. At optional Step 706, the plurality of aligned first conductive structures and second conductive structure are pressed together with a predetermined amount of bond force. The predetermined amount of bond force may be a single bond force value, or may be a bond force profile where the actual bond force is varied during the bonding operation. At optional Step 708, heat is applied to the plurality of aligned first conductive structures and/or second conductive structures. For example, heat may be applied to the first conductive structures using the support structure that supports the first semiconductor element. Likewise, heat may be applied to the second conductive structures using the bonding tool that retains the second semiconductor element At Step 710, the plurality of first conductive structures and second conductive structures are ultrasonically bonded together to form ultrasonic bonds therebetween.

As will be appreciated by those skilled in the art, the invention has particular benefits when an ambient/lower temperature bonding operation is desired as the invention bonds aluminum materials to aluminum materials which may be readily accomplished with ultrasonic energy and/or bond force, often without the need for heat.

Although the invention has been illustrated and described primarily with respect to two pairs of conductive structures ultrasonically bonded together, it is of course not limited thereto. In practice, semiconductor packages (e.g., advanced packages) assembled in accordance with the invention may have any number of conductive structures, and may have hundreds of pairs (or even thousands) of conductive structures ultrasonically bonded together. Further, the conductive structures need not be bonded in pairs. For example, one structure may be bonded to two or more opposing structures. Thus, any number of conductive structures from one semiconductor element may be ultrasonically bonded to any number of conductive structures of another semiconductor element.

Although the invention primarily describes (and illustrates) the application of ultrasonic energy through a bonding tool (e.g., where the bonding tool is engaged with an ultrasonic transducer), it is not limited thereto. Rather, the ultrasonic energy may be transmitted through any desired structure, such as for example the support structure.

As will be appreciated by those skilled in the art, the details of the ultrasonic bonding may vary widely depending on the specific application. Nonetheless, some non-limiting exemplary details are now described. For example, the frequency of the ultrasonic transducer may be designed in connection with the design of the conductive structures (e.g., pillar structures, etc.), such that a transducer resonant frequency substantially coincides with a resonant frequency of the given semiconductor element—in this regard, the conductive structures may act dynamically as a cantilever beam. In another exemplary alternative, the transducer may be operated at an off-resonant condition relative to the semiconductor element in a simple “driven” type fashion.

Exemplary ranges for the energy applied to the ultrasonic transducer (e.g., applied to piezoelectric crystals/ceramics in the transducer driver) may be in the range of 0.1 kHz-160 kHz, 10 kHz-120 kHz, 20 kHz-60 kHz, etc. A single frequency may be applied, or a plurality of frequencies may be applied during bonding (e.g., sequentially, simultaneously, or both). The scrub of the semiconductor element (i.e., vibrational energy applied to the semiconductor element held by the bonding tool) may be applied in any of a number of desired directions, and may be applied: through a bonding tool holding a semiconductor element (as illustrated herein); through a support structure supporting a semiconductor element; amongst other configurations. Referring specifically to the embodiments illustrated herein (where the ultrasonic energy is applied through a bonding tool holding a semiconductor element), the scrub may be applied in a direction substantially parallel to, or substantially perpendicular to, a longitudinal axis of the bond tool (or in other directions).

The vibrational energy applied by the ultrasonic transducer may be applied, for example, in the peak-to-peak amplitude range of 0.1 um to 10 um (e.g., with feedback control of constant voltage, constant current, or alternate control schemes including but not limited to ramped current, ramped voltage, or proportional feedback control based on one or more inputs).

As described herein, bond force may also be applied during at least a portion of the ultrasonic bonding cycle. An exemplary range for the bond force is 0.1 kg to 100 kg. The bond force may be applied as a constant value, or may be a bond force profile that changes during the bonding cycle. In a controlled bond force implementation, the feedback control of the bond force may be constant, ramped or proportional based on one or more inputs (e.g., ultrasonic amplitude, time, velocity, deformation, temperature, etc).

As described herein, one or more of the semiconductor elements may be heated prior to and/or during the bond cycle. An exemplary range of the temperature of a semiconductor element is between 20° C.-250° C. The heat (e.g., applied through one or both of the bond tool and the support structure, or other elements) may be applied as a constant value, or may be a temperature profile that changes during the bonding cycle—and may be controlled using feedback control.

Although the invention has been illustrated and described primarily with respect to forming ultrasonic bonds between aluminum conductive structures on respective semiconductor elements, it is of course not limited thereto. That is, the teachings of the invention may have applicability in forming ultrasonic bonds between conductive structures having varying compositions. An exemplary list of materials for the conductive structures being joined includes: aluminum to copper (i.e., forming ultrasonic bonds between aluminum conductive structures on one semiconductor element to copper conductive structures on another semiconductor element); lead free solder (e.g., primarily composed of tin) to copper; lead free solder to aluminum; copper to copper; aluminum to silver; copper to silver; aluminum to gold; gold to gold; and copper to gold. Of course, other combinations of conductive structure compositions (e.g., indium) are contemplated.

As provided above, while aspects of the invention have been described in connection with an aluminum material included in the various conductive structures of the semiconductor elements, the invention is not limited thereto. That is, the conductive structures on the semiconductor elements may include (or be formed of) various different materials. For example, the conductive structures on the upper semiconductor element (e.g., the element being carried, and bonded, using a bonding tool), and/or the conductive structures on the lower semiconductor element (e.g., the element to which the upper conductive element is bonded), may be formed of (or include) copper.

In accordance with certain aspects of the invention, ultrasonic scrub/energy may be utilized in connection with a multi-step bonding process. For example, the ultrasonic scrub/energy may be used as an initiator for flip chip and/or thermo-compression bonding processes. The ultrasonic scrubbing may be used, for example, to remove oxides in connection with the formation of an initial bond, thereby preparing for a final joining process (e.g., a diffusion joining process). Such a multi-step bonding process may have many different configurations. For example, using the ultrasonic scrub/energy, a bonding tool may form initial bonds (e.g., “tack” bonds) between first conductive structures on a first semiconductor element and second conductive structures on a second semiconductor element. The bonds may be completed using the same bonding tool (e.g., through the application of heat and/or force)—where FIGS. 8A-8D illustrate an example of such a process. In another example, the bonds may be completed later using a different process (e.g., on the same bonding machine, on a different bonding machine, etc.). Using such a later (different) process, the bonds of multiple elements may be completed at one time through a “gang” type of bonding process—where the addition of FIG. 8E illustrates an example of such a process along with FIGS. 8A-8C.

Thus, according to certain embodiments of the invention, ultrasonic scrub (along with force, as desired) is utilized to initiate a stable and robust weld before subsequent flip chip and/or thermo-compression bonding of a semiconductor element (e.g., a semiconductor die) to another semiconductor element (e.g., to a substrate, to another die, to a wafer, etc.). The ultrasonic motion scrubs away the oxide on the surfaces to be joined. The ultrasonic scrub and/or force are intended to tack the interconnects together (i.e., conductive structures of a first semiconductor element to conductive structures of a second semiconductor element) with a desired benefit of preventing oxidation of the bonding surfaces of the conductive structures. Examples of the conductive structures to be joined include Sn to Cu, Cu to Al, Al to Al, and Cu to Cu. Of course, other combinations of conductive structure materials are contemplated. After being tacked a semiconductor element (e.g., a die) can be individually or gang bonded.

FIGS. 8A-8E (along with the flow diagram of FIG. 9), FIGS. 10A-10E (along with the flow diagram of FIG. 11), FIGS. 12A-12D (along with the flow diagram of FIG. 13), and FIGS. 14A-14D (along with the flow diagram of FIG. 15) illustrate systems and methods of forming interconnections between semiconductor elements utilizing exemplary multi-step bonding processes. FIGS. 9, 11, 13, and 15 are flow diagrams illustrating methods of bonding semiconductor elements together in accordance with exemplary embodiments of the invention. As is understood by those skilled in the art, certain steps included in the flow diagrams may be omitted; certain additional steps may be added; and the order of the steps may be altered from the order illustrated.

Referring specifically to FIG. 8A, upper semiconductor element 808 is retained (e.g., by vacuum, such as through vacuum ports defined by the holding surface of holding portion 810) by holding portion 810 of bonding tool 824. Upper semiconductor element 808 includes upper conductive structures 812 a, 812 b (e.g., copper conductive structures such as copper pillars, or other conductive structures) on a lower surface thereof. Lower semiconductor element 860 includes semiconductor die 802 bonded to (or otherwise supported by) substrate 804. Substrate 804 may be, for example, an organic substrate, a semiconductor wafer, a temporary supporting structure (e.g., a silicon, metal or glass wafer or panel), amongst other substrates. In another example, semiconductor die 802 may still be a portion of a semiconductor wafer regardless the drawing showing a separate substrate 804. Lower conductive structures 806 a, 806 b (e.g., copper conductive structures such as copper pillars, other conductive structures) are provided on an upper surface of lower semiconductor die 802. Substrate 804 in turn is supported by support structure 850 (e.g., a heat block of machine 800, an anvil of machine 800, or any other desired support structure). Alternatively, semiconductor die 802 may still be a portion of a whole or partial wafer supported directly by the support structure 850 without any additional intervening substrate 804. In the configuration shown in FIG. 8A (preparing for bonding), each of upper conductive structures 812 a, 812 b are generally aligned with opposing respective lower conductive structures 806 a, 806 b. Semiconductor element 808 is moved downward through the motion of bonding tool 824 (as shown by the arrows 826 in FIG. 8A). Following this motion, FIG. 8B illustrates contact between the respective conductive structures 806 a, 812 a and 806 b, 812 b. Ultrasonic energy 814 is applied to upper semiconductor element 808 and upper conductive structures 812 a, 812 b through bonding tool 824 using an ultrasonic transducer (not shown but indicated in the drawings as “USG”, that is, ultrasonic generator). For example, an ultrasonic transducer that carries bonding tool 824 may in turn be carried by a bond head assembly of flip chip bonding machine 800. During the ultrasonic bonding, lower conductive structures 806 a, 806 b may be held relatively stationary through the support of lower semiconductor element 860 by support structure 850 (e.g., a support surface of support structure 850 may include one or more vacuum ports to secure substrate 804 to support structure 850 during bonding). Ultrasonic energy 814 (along with optional bond force and/or heat) may cause partial deformation of the conductive structures. For example, conductive structures 806 a, 806 b and 812 a, 812 b are illustrated as being deformed (or at least partially deformed) in FIG. 8C. Initial (tack) ultrasonic bonds are formed between respective pairs of conductive structures in FIG. 8C. For example, as shown in FIG. 8C, initial (e.g., tack) ultrasonic bond 828 a is formed between deformed conductive structures 812 a′/806 a′, and initial (e.g., tack) ultrasonic bond 828 b is formed between deformed conductive structures 812 b′/806 b′.

In certain embodiments of the invention, a multi-step bonding process may be completed as shown at FIG. 8D. That is, at FIG. 8C initial (tack) bonds have been formed, and at FIG. 8D, the final bonds may be formed using heat and/or force from bonding tool 824 or a different bonding tool 824 a (e.g., on the same or on a different machine).

In other embodiments of the invention, the final bonds may be formed as shown in FIG. 8E, on a group or “gang” basis (e.g., bonding multiple semiconductor elements at the same time), using a different bonding tool (e.g., on the same or on a different machine). In such an embodiment, after FIG. 8C, the conductive structures of semiconductor elements 808, 860 are “tack” bonded together. Then, at FIG. 8E a group of upper semiconductor elements 808 are “gang” bonded (e.g., using heat and/or force) to a respective group of lower semiconductor elements 860. In the example shown in FIG. 8E, a gang bonding tool 875 is provided—which tool 875 may be utilized on machine 800 from FIG. 8A, or a different flip chip and/or thermocompression machine. If on the same machine, support structure 850 (from FIG. 8A) may be used for supporting the multiple lower semiconductor elements 860 during the “gang” bonding process. If on a different machine, support structure 879 may be used for supporting the multiple lower semiconductor elements 860 during the “gang” bonding process. The “gang” bonding tool 875 (including holding portion 877) completes the bonding of the conductive structures of the multiple upper semiconductor elements 808 to the conductive structures of the corresponding lower semiconductor elements 860 (where each element 860 includes a die 802, as described above in connection with FIG. 8A). During this final bonding process, heat and/or force may be provided by bonding tool 875, by support structure 850/879, or both.

Referring specifically to FIG. 9, at Step 900, a first semiconductor element (e.g., including a semiconductor die on a substrate, such as element 860 shown in FIG. 8A) is supported on a support structure of a bonding machine. The first semiconductor element (e.g., an upper surface of the semiconductor structure) includes a plurality of first conductive structures. At Step 902, a second semiconductor element is retained by a holding portion of a bonding tool of the bonding machine (see, e.g., element 808 in FIG. 8A). The second semiconductor element includes a plurality of second conductive structures (e.g., on a lower surface of the second semiconductor element). At Step 904, the first conductive structures and the second conductive structures are aligned with one another (see, e.g., FIG. 8A) and are then brought into contact with one another (see, e.g., FIG. 8B). At Step 906, ultrasonic energy is applied to the second semiconductor element (through a bonding tool carrying the second semiconductor element, such as in FIG. 8B), such that the conductive structures of the second semiconductor are “initially” bonded (e.g., tack bonded) to the conductive structures of the first semiconductor element as shown in FIG. 8C (see tack bonds 828 a, 828 b).

Steps 908A, 908B, and 908C are generally viewed herein as alternatives to one another. At Step 908A, the flip chip (e.g., thermocompression) bonding process of the first conductive structures to the second conductive structures is completed on an individual basis (by bonding semiconductor elements one at a time) using the same bonding tool as used in Step 906. For example, referring to the example shown in FIG. 8D, heat and/or pressure may be applied using bonding tool 824 to form completed bonds 828 a′ (including further deformed conductive structures 806 a″, 812 a″) and 828 b′ (including further deformed conductive structures 806 b″, 812 b″).

As an alternative to Step 908A, at Step 908B, the flip chip (e.g., thermocompression) bonding process of the first conductive structures to the second conductive structures is completed on an individual basis (by bonding semiconductor elements one at a time) using a different tool (e.g., a different bonding tool on the same machine, a different bonding tool on a different machine) as compared to the bonding tool used in Step 906. For example, referring again to the example shown in FIG. 8D (where element 860 is supported by support structure 850 a), heat and/or pressure may be applied using bonding tool 824 a (including holding portion 810 a) to form completed bonds 828 a′ (including further deformed conductive structures 806 a″, 812 a″) and 828 b′ (including further deformed conductive structures 806 b″, 812 b″).

As an alternative to either of Steps 908A, Step 908B, at Step 908C the flip chip (e.g., thermocompression) bonding process of the first conductive structures to the second conductive structures is completed on a group basis (by bonding a plurality of semiconductor elements at the same time) using a different tool (e.g., a different bonding tool on the same machine, a different bonding tool on a different machine) as compared to the bonding tool used in Step 906. For example, referring now to the example shown in FIG. 8E, heat and/or pressure may be applied using bonding tool 875 (including holding portion 877, bonding a plurality of semiconductor elements 808 to corresponding semiconductor elements 860) (where elements 860 may be supported by support structure 850 if on the same bonding machine 800, or on support structure 879 if on a different bonding machine) to form completed bonds including further deformed conductive structure pairs 806 a′a, 812 a′a and 806 b′b, 812 b′b.

Thus, through the options described in FIG. 9 (and illustrated in FIGS. 8A-8E), various types of systems and methods for tack and weld (or tack and gang) bonding are described. Of course, further variations of forming an initial (tack) bond, followed by a completed (final) bond, are contemplated within the scope of the invention. Certain variations to the systems and processes shown and described in connection with FIGS. 8A-8E and FIG. 9 (and other systems and processes within the scope of the invention) relate to the use of non-conductive material (e.g., a paste, an epoxy, an acrylate, a silicone, a bis-maleimide, a polyimide, a polyester, etc., or a non-conductive film) being provided between the semiconductor elements being bonded together. Such non-conductive material may contain inorganic filler material, such as powders of silica or alumina. FIGS. 10A-10E (and the flow diagram in FIG. 11), FIGS. 12A-12D (and the flow diagram in FIG. 13), and FIGS. 14A-14D (and the flow diagram in FIG. 15) illustrate examples of such systems and processes.

Referring specifically to FIG. 10A, upper semiconductor element 1008 is retained (e.g., by vacuum, such as through vacuum ports defined by the holding surface of holding portion 1010) by holding portion 1010 of bonding tool 1024. Upper semiconductor element 1008 includes upper conductive structures 1012 a, 1012 b (e.g., copper conductive structures such as copper pillars, or other conductive structures) on a lower surface thereof. Lower semiconductor element 1060 includes semiconductor die 1002 bonded to (or otherwise supported by) substrate 1004. Substrate 1004 may be, for example, an organic substrate, a semiconductor wafer, a temporary supporting structure (e.g., a silicon, metal or glass wafer or panel), amongst other substrates. In another example, semiconductor die 1002 may still be a portion of a semiconductor wafer regardless the drawing showing a separate substrate 1004. Lower conductive structures 1006 a, 1006 b (e.g., copper conductive structures such as copper pillars, other conductive structures) are provided on an upper surface of lower semiconductor die 1002. Substrate 1004 in turn is supported by support structure 1050 (e.g., a heat block of machine 1000, an anvil of machine 1000, or any other desired support structure). Alternatively, semiconductor die 1002 may still be a portion of a whole or partial wafer supported directly by the support structure 1050 without any additional intervening substrate 1004. In the configuration shown in FIG. 10A (preparing for bonding), each of upper conductive structures 1012 a, 1012 b are generally aligned with opposing respective lower conductive structures 1006 a, 1006 b. Semiconductor element 1008 is moved downward through the motion of bonding tool 1024 (as shown by the arrows 1026 in FIG. 10A). Following this motion, FIG. 10B illustrates contact between the respective conductive structures 1006 a, 1012 a and 1006 b, 1012 b. Ultrasonic energy 1014 is applied to upper semiconductor element 1008 and upper conductive structures 1012 a, 1012 b through bonding tool 1024 using an ultrasonic transducer (not shown but indicated in the drawings as “USG”, that is, ultrasonic generator). For example, an ultrasonic transducer that carries bonding tool 1024 may in turn be carried by a bond head assembly of flip chip bonding machine 1000. During the ultrasonic bonding, lower conductive structures 1006 a, 1006 b may be held relatively stationary through the support of lower semiconductor element 1060 by support structure 1050 (e.g., a support surface of support structure 1050 may include one or more vacuum ports to secure substrate 1004 to support structure 1050 during bonding). Ultrasonic energy 1014 (along with optional bond force and/or heat) may cause partial deformation of the conductive structures. For example, conductive structures 1006 a′, 1006 b′ and 1012 a′, 1012 b′ are illustrated as being deformed (or at least partially deformed) in FIG. 10C (as compared to FIGS. 10A-10B). Initial (tack) ultrasonic bonds 1028 a, 1028 b are formed between respective pairs of conductive structures in FIG. 10C. For example, as shown in FIG. 10C, initial (e.g., tack) ultrasonic bond 1028 a is formed between deformed conductive structures 1012 a′/1006 a′, and initial (e.g., tack) ultrasonic bond 1028 b is formed between deformed conductive structures 1012 b′/1006 b′.

After formation of the initial (tack) ultrasonic bonds as shown in FIG. 10C, a non-conductive material 1040 (e.g., a non-conductive paste, an epoxy material, an acrylate, a silicone, a bis-maleimide, a polyimide, a polyester, etc.—where such non-conductive material may include inorganic particles such as silica or alumina particles, etc.) is applied between semiconductor element 1008 and semiconductor element 1002 as shown in FIG. 10D. Material 1040 may be applied in any desired manner (e.g., dispensed as a fluid, dispensed using capillary underfill techniques, etc.), depending on the material selected and other details of the application. At FIG. 10E, the bonding of the first conductive structures to the second conductive structures has been completed (e.g., using heat, pressure, etc.) to form completed bonds 1028 a′ (including further deformed conductive structures 1006 a″, 1012 a″) and 1028 b′ (including further deformed conductive structures 1006 b″, 1012 b″). At FIG. 10E, the non-conductive material applied at FIG. 10D has been cured to form cured conductive material 1040′.

Referring specifically to FIG. 11, at Step 1100, a first semiconductor element (e.g., including a semiconductor die on a substrate, such as element 1060 shown in FIG. 10A) is supported on a support structure of a bonding machine. The first semiconductor element (e.g., an upper surface of the semiconductor structure) includes a plurality of first conductive structures. At Step 1102, a second semiconductor element is retained by a holding portion of a bonding tool of the bonding machine (see, e.g., element 1008 in FIG. 10A). The second semiconductor element includes a plurality of second conductive structures (e.g., on a lower surface of the second semiconductor element). At Step 1104, the first conductive structures and the second conductive structures are aligned with one another (see, e.g., FIG. 10A) and are then brought into contact with one another (see, e.g., FIG. 10B). At Step 1106, ultrasonic energy is applied to the second semiconductor element (through a bonding tool carrying the second semiconductor element, such as in FIG. 10B), such that the conductive structures of the second semiconductor are “initially” bonded (e.g., tack bonded) to the conductive structures of the first semiconductor element as shown in FIG. 10C (see tack bonds 1028 a, 1028 b). At Step 1108, a non-conductive material is applied between the first semiconductor element and the second semiconductor element (see, e.g., material 1040 applied at FIG. 10D). At Step 1110, the flip chip and/or thermocompression bonding of the first conductive structures and the second conductive structures is completed (e.g., through the application of heat and/or force), and at Step 1112 the non-conductive material has been cured (see FIG. 10E). As will be appreciated by those skilled in the art, Steps 1110 and 1112 may be performed at the same time, if desired.

Referring specifically to FIG. 12A, upper semiconductor element 1208 is retained (e.g., by vacuum, such as through vacuum ports defined by the holding surface of holding portion 1210) by holding portion 1210 of bonding tool 1224. Upper semiconductor element 1208 includes upper conductive structures 1212 a, 1212 b (e.g., copper conductive structures such as copper pillars, or other conductive structures) on a lower surface thereof. Lower semiconductor element 1260 includes semiconductor die 1202 bonded to (or otherwise supported by) substrate 1204. Substrate 1204 may be, for example, an organic substrate, a semiconductor wafer, a temporary supporting structure (e.g., a silicon, metal or glass wafer or panel), amongst other substrates. In another example, semiconductor die 1202 may still be a portion of a semiconductor wafer regardless the drawing showing a separate substrate 1204. Lower conductive structures 1206 a, 1206 b (e.g., copper conductive structures such as copper pillars, other conductive structures) are provided on an upper surface of lower semiconductor die 1202. Substrate 1204 in turn is supported by support structure 1250 (e.g., a heat block of machine 1200, an anvil of machine 1200, or any other desired support structure). Alternatively, semiconductor die 1202 may still be a portion of a whole or partial wafer supported directly by the support structure 1250 without any additional intervening substrate 1204. In the configuration shown in FIG. 12A (preparing for bonding), each of upper conductive structures 1212 a, 1212 b are generally aligned with opposing respective lower conductive structures 1206 a, 1206 b. Also shown in FIG. 12A is a non-conductive material 1240 (e.g., a non-conductive paste, an epoxy material, an acrylate, a silicone, a bis-maleimide, a polyimide, a polyester, etc.—where such non-conductive material may include inorganic particles such as silica or alumina particles, etc.) applied between semiconductor element 1208 and semiconductor element 1202 as shown in FIG. 12A (in this example, the material 1240 is actually applied onto semiconductor die 1202). Material 1240 may be applied in any desired manner (e.g., dispensed as a fluid, dispensed using capillary underfill techniques, etc.), depending on the material selected and other details of the application.

As shown in FIG. 12A, semiconductor element 1208 is moved downward through the motion of bonding tool 1224 (as shown by the arrows 1226 in FIG. 12A). This motion results in the distribution of the non-conductive material 1240 between semiconductor element 1208 and semiconductor element 1260, including surrounding 1206 a, 1212 a and 1206 b, 1212 b. Following this motion, FIG. 12B illustrates contact between the respective conductive structures 1206 a, 1212 a and 1206 b, 1212 b. Ultrasonic energy 1214 is applied to upper semiconductor element 1208 and upper conductive structures 1212 a, 1212 b through bonding tool 1224 using an ultrasonic transducer (not shown but indicated in the drawings as “USG”, that is, ultrasonic generator). For example, an ultrasonic transducer that carries bonding tool 1224 may in turn be carried by a bond head assembly of flip chip bonding machine 1200. During the ultrasonic bonding, lower conductive structures 1206 a, 1206 b may be held relatively stationary through the support of lower semiconductor element 1260 by support structure 1250 (e.g., a support surface of support structure 1250 may include one or more vacuum ports to secure substrate 1204 to support structure 1250 during bonding). Ultrasonic energy 1214 (along with optional bond force and/or heat) may cause partial deformation of the conductive structures. For example, conductive structures 1206 a′, 1206 b′ and 1212 a′, 1212 b′ are illustrated as being deformed (or at least partially deformed) in FIG. 12C (as compared to FIGS. 12A-12B). Initial (tack) ultrasonic bonds 1228 a, 1228 b are formed between respective pairs of conductive structures in FIG. 12C. For example, as shown in FIG. 12C, initial (e.g., tack) ultrasonic bond 1228 a is formed between deformed conductive structures 1212 a′/1206 a′, and initial (e.g., tack) ultrasonic bond 1228 b is formed between deformed conductive structures 1212 b′/1206 b′.

After formation of the initial (tack) ultrasonic bonds as shown in FIG. 12C, at FIG. 12D, the bonding of the first conductive structures to the second conductive structures has been completed (e.g., using heat, pressure, etc.) to form completed bonds 1228 a′ (including further deformed conductive structures 1206 a″, 1212 a″) and 1228 b′ (including further deformed conductive structures 1206 b″, 1212 b″). At FIG. 12D, the non-conductive material applied at FIG. 12A has been cured to form cured conductive material 1240′.

Referring specifically to FIG. 13, at Step 1300, a first semiconductor element (e.g., including a semiconductor die on a substrate, such as element 1360 shown in FIG. 12A) is supported on a support structure of a bonding machine. The first semiconductor element (e.g., an upper surface of the semiconductor structure) includes a plurality of first conductive structures. At Step 1302, a second semiconductor element is retained by a holding portion of a bonding tool of the bonding machine (see, e.g., element 1308 in FIG. 12A). The second semiconductor element includes a plurality of second conductive structures (e.g., on a lower surface of the second semiconductor element). At Step 1304, a non-conductive material is applied between the first semiconductor element and the second semiconductor element (see, e.g., material 1240 applied at FIG. 12A). At Step 1306, the first conductive structures and the second conductive structures are aligned with one another (see, e.g., FIG. 12A) and are then brought into contact with one another (see, e.g., FIG. 12B). At Step 1308, ultrasonic energy is applied to the second semiconductor element (through a bonding tool carrying the second semiconductor element, such as in FIG. 12B), such that the conductive structures of the second semiconductor are “initially” bonded (e.g., tack bonded) to the conductive structures of the first semiconductor element as shown in FIG. 12C (see tack bonds 1228 a, 1228 b). At Step 1310, the flip chip and/or thermocompression bonding of the first conductive structures and the second conductive structures is completed (e.g., through the application of heat and/or force), and at Step 1312 the non-conductive material has been cured (see FIG. 12D). As will be appreciated by those skilled in the art, Steps 1310 and 1312 may be performed at the same time, if desired.

Referring specifically to FIG. 14A, upper semiconductor element 1408 is retained (e.g., by vacuum, such as through vacuum ports defined by the holding surface of holding portion 1410) by holding portion 1410 of bonding tool 1424. Upper semiconductor element 1408 includes upper conductive structures 1412 a, 1412 b (e.g., copper conductive structures such as copper pillars, or other conductive structures) on a lower surface thereof. Lower semiconductor element 1460 includes semiconductor die 1402 bonded to (or otherwise supported by) substrate 1404. Substrate 1404 may be, for example, an organic substrate, a semiconductor wafer, a temporary supporting structure (e.g., a silicon, metal or glass wafer or panel), amongst other substrates. In another example, semiconductor die 1402 may still be a portion of a semiconductor wafer regardless the drawing showing a separate substrate 1404. Lower conductive structures 1406 a, 1406 b (e.g., copper conductive structures such as copper pillars, other conductive structures) are provided on an upper surface of lower semiconductor die 1402. Substrate 1404 in turn is supported by support structure 1450 (e.g., a heat block of machine 1400, an anvil of machine 1400, or any other desired support structure). Alternatively, semiconductor die 1402 may still be a portion of a whole or partial wafer supported directly by the support structure 1450 without any additional intervening substrate 1404. In the configuration shown in FIG. 14A (preparing for bonding), each of upper conductive structures 1412 a, 1412 b are generally aligned with opposing respective lower conductive structures 1406 a, 1406 b. Also shown in FIG. 14A is a non-conductive film 1440 (e.g., applied as a solid non-conductive film, etc.) applied between semiconductor element 1408 and semiconductor element 1402 (in this example, the film 1440 is actually applied onto semiconductor die 1402).

As shown in FIG. 14A, semiconductor element 1408 is moved downward through the motion of bonding tool 1424 (as shown by the arrows 1426 in FIG. 14A). This motion results in the distribution of the non-conductive film 1440 (perhaps exaggerated in FIG. 14B) between semiconductor element 1408 and semiconductor element 1460, including surrounding conductive structures 1406 a, 1412 a and 1406 b, 1412 b. Following this motion, FIG. 14B illustrates contact between the respective conductive structures 1406 a, 1412 a and 1406 b, 1412 b. Ultrasonic energy 1214 is applied to upper semiconductor element 1408 and upper conductive structures 1412 a, 1412 b through bonding tool 1424 using an ultrasonic transducer (not shown but indicated in the drawings as “USG”, that is, ultrasonic generator). For example, an ultrasonic transducer that carries bonding tool 1424 may in turn be carried by a bond head assembly of flip chip bonding machine 1400. During the ultrasonic bonding, lower conductive structures 1406 a, 1406 b may be held relatively stationary through the support of lower semiconductor element 1460 by support structure 1450 (e.g., a support surface of support structure 1450 may include one or more vacuum ports to secure substrate 1404 to support structure 1450 during bonding). Ultrasonic energy 1414 (along with optional bond force and/or heat) may cause partial deformation of the conductive structures. For example, conductive structures 1406 a′, 1406 b′ and 1412 a′, 1412 b′ are illustrated as being deformed (or at least partially deformed) in FIG. 14C (as compared to FIGS. 14A-14B). Initial (tack) ultrasonic bonds 1428 a, 1428 b are formed between respective pairs of conductive structures in FIG. 14C. For example, as shown in FIG. 14C, initial (e.g., tack) ultrasonic bond 1428 a is formed between deformed conductive structures 1412 a′/1406 a′, and initial (e.g., tack) ultrasonic bond 1428 b is formed between deformed conductive structures 1412 b′/1406 b′.

After formation of the initial (tack) ultrasonic bonds as shown in FIG. 14C, at FIG. 14D, the bonding of the first conductive structures to the second conductive structures has been completed (e.g., using heat, pressure, etc.) to form completed bonds 1428 a′ (including further deformed conductive structures 1406 a″, 1412 a″) and 1428 b′ (including further deformed conductive structures 1406 b″, 1412 b″). At FIG. 14D, the non-conductive material applied at FIG. 14A has been cured to form cured non-conductive conductive material 1440′.

Referring specifically to FIG. 15, at Step 1500, a first semiconductor element (e.g., including a semiconductor die on a substrate, such as element 1460 shown in FIG. 14A) is supported on a support structure of a bonding machine. The first semiconductor element (e.g., an upper surface of the semiconductor structure) includes a plurality of first conductive structures. At Step 1502, a second semiconductor element is retained by a holding portion of a bonding tool of the bonding machine (see, e.g., element 1408 in FIG. 14A). The second semiconductor element includes a plurality of second conductive structures (e.g., on a lower surface of the second semiconductor element). At Step 1504, a non-conductive film is applied between the first semiconductor element and the second semiconductor element (see, e.g., film 1440 applied at FIG. 14A). At Step 1506, the first conductive structures and the second conductive structures are aligned with one another (see, e.g., FIG. 14A) and are then brought into contact with one another (see, e.g., FIG. 14B). At Step 1508, ultrasonic energy is applied to the second semiconductor element (through a bonding tool carrying the second semiconductor element, such as in FIG. 14B), such that the conductive structures of the second semiconductor are “initially” bonded (e.g., tack bonded) to the conductive structures of the first semiconductor element as shown in FIG. 14C (see tack bonds 1428 a, 1428 b). At Step 1510, the flip chip and/or thermocompression bonding of the first conductive structures and the second conductive structures is completed (e.g., through the application of heat and/or force), and at Step 1512 the non-conductive film has been cured (see FIG. 14D). As will be appreciated by those skilled in the art, Steps 1510 and 1512 may be performed at the same time, if desired.

Each of FIGS. 10A-10E, 12A-12D, and 14A-14D are shown as utilizing the original bonding tool to complete both the initial (tack) ultrasonic bonding, and the subsequent complete bonding step. However, it is understood that each of these embodiments (and the corresponding flow diagrams shown at FIGS. 11, 13, and 15) may utilize a different tool for completing the final bond, where the different tool may be on the same bonding machine or a different bonding machine, and where the different tool may bond the semiconductor elements individually or as a group (e.g., as in FIG. 8E). Each of the embodiments shown in FIGS. 8A-8E, 9, 10A-10E, 11, 12A-12D, 13, 14A-14D, 15 has particular applicability to tack and gang processes, where elements are first ultrasonically tack bonded as individual elements (e.g., see FIGS. 8C, 10C, 12C, 14C), and are later gang bonded (using a gang bonding tool, such as tool 875 shown in FIG. 8E) using heat and/or pressure to further deform the conductive structures into a final completed bonded state. Such tack and gang processes have excellent applicability in a chip to wafer (“C2W”) environment—that is, individual semiconductor die (chips) are ultrasonically tack bonded to a wafer individually using a ultrasonic bonding tool, and then a group of the bonded die are gang bonded using the gang bonding tool (e.g., with heat and/or pressure).

Multi-step bonding using (i) an initial ultrasonic tack bonding process where individual semiconductor elements (e.g., die) are tack bonded using an ultrasonic bonding tool, followed by (ii) a gang bonding process where multiple semiconductor elements go through the final bonding process (using a gang bonding tool along with heat and/or pressure), have particular applicability in bonding upper copper conductive structures (on the upper semiconductor element) to lower copper conductive structures (on the lower semiconductor element). The process of forming the final bond tends to involve annealing to grow grains across the interface of the upper and lower conductive structures. This process tends to involve a relatively significant amount of time. In order to provide a useful process throughout (e.g., UPH, or units per hour), gang bonding has particular applicability. Thus, a relatively quick “tack” ultrasonic bonding process may be completed one semiconductor element at a time, and a relatively slow “gang” bonding process (involving heat and/or pressure) may be completed with a plurality of semiconductor elements being bonded at the same time.

Although the invention is illustrated and described herein with reference to specific embodiments, the invention is not intended to be limited to the details shown. Rather, various modifications may be made in the details within the scope and range of equivalents of the claims and without departing from the invention. 

What is claimed:
 1. A method of ultrasonically bonding semiconductor elements, the method comprising the steps of: (a) aligning surfaces of a plurality of second conductive structures of a second semiconductor element to respective surfaces of a plurality of first conductive structures of a first semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures, wherein step (b) includes ultrasonically forming tack bonds using a bonding tool configured to bond the second semiconductor element to the first semiconductor element; and (c) forming completed bonds between the first conductive structures and the second conductive structures.
 2. The method of claim 1 wherein the first semiconductor element is a semiconductor die.
 3. The method of claim 1 wherein each of the first semiconductor element and the second semiconductor element is a respective semiconductor die.
 4. The method of claim 1 wherein the first semiconductor element includes a semiconductor die.
 5. The method of claim 1 wherein each of the first semiconductor element and the second semiconductor element includes a respective semiconductor die.
 6. The method of claim 1 further comprising the step of moving the second semiconductor element towards the first semiconductor element such that lower surfaces of the second conductive structures contact upper surfaces of the respective conductive structures.
 7. The method of claim 1 further comprising the step of heating the second semiconductor element, during at least a portion of step (b), using a bonding tool that retains the second semiconductor element.
 8. The method of claim 1 further comprising the step of heating the first semiconductor element, during at least a portion of step (b), using a support structure that supports the first semiconductor element during step (b).
 9. The method of claim 1 wherein at least one of the plurality of first conductive structures and the plurality of second conductive structures is formed of copper.
 10. The method of claim 1 each of the plurality of first conductive structures and the plurality of second conductive structures is a copper conductive structure.
 11. The method of claim 1 wherein step (b) includes ultrasonically bonding the ones of the second conductive structures to the respective ones of the first conductive structures using a bonding tool that retains the second semiconductor element during step (b).
 12. The method of claim 11 wherein the bonding tool is engaged with an ultrasonic transducer for providing ultrasonic energy during step (b).
 13. The method of claim 11 wherein the bonding tool retains the second semiconductor element during step (b) using vacuum.
 14. The method of claim 1 wherein step (c) includes heating the second semiconductor element with the bonding tool to form the completed bonds.
 15. A method of ultrasonically bonding semiconductor elements, the method comprising the steps of: (a) aligning surfaces of a plurality of second conductive structures of a second semiconductor element to respective surfaces of a plurality of first conductive structures of a first semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures, further comprising the step of applying pressure between the first semiconductor element and the second semiconductor element during at least a portion of step (b).
 16. A method of ultrasonically bonding semiconductor elements, the method comprising the steps of: (a) aligning surfaces of a plurality of second conductive structures of a second semiconductor element to respective surfaces of a plurality of first conductive structures of a first semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures, further comprising the step of deforming ones of the second conductive structures during step (b).
 17. A method of ultrasonically bonding semiconductor elements, the method comprising the steps of: (a) aligning surfaces of a plurality of second conductive structures of a second semiconductor element to respective surfaces of a plurality of first conductive structures of a first semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures, wherein step (b) is conducted at ambient temperature.
 18. A method of ultrasonically bonding semiconductor elements, the method comprising the steps of: (a) aligning surfaces of a plurality of second conductive structures of a second semiconductor element to respective surfaces of a plurality of first conductive structures of a first semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures, further comprising the step of heating at least one of the first semiconductor element and the second semiconductor element during at least a portion of step (b).
 19. A method of ultrasonically bonding semiconductor elements, the method comprising the steps of: (a) aligning surfaces of a plurality of second conductive structures of a second semiconductor element to respective surfaces of a plurality of first conductive structures of a first semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures, wherein step (c) includes heating at least one of the first semiconductor element and the second semiconductor element to form the completed bonds.
 20. A method of ultrasonically bonding semiconductor elements, the method comprising the steps of: (a) aligning surfaces of a plurality of second conductive structures of a second semiconductor element to respective surfaces of a plurality of first conductive structures of a first semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures, wherein step (c) is included in a gang bonding process during which a plurality of completed bonds are formed between first conductive structures of a plurality of first semiconductor elements and corresponding second conductive structures of a plurality of first semiconductor elements.
 21. The method of claim 20 wherein the gang bonding process is completed using a heated gang bonding tool.
 22. A method of ultrasonically bonding semiconductor elements, the method comprising the steps of: (a) aligning surfaces of a plurality of second conductive structures of a second semiconductor element to respective surfaces of a plurality of first conductive structures of a first semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures, further comprising the step of applying a non-conductive material between the first semiconductor element and the second semiconductor element.
 23. A bonding system comprising: a support structure for supporting a first semiconductor element, the first semiconductor element including a plurality of first conductive structures; a bonding tool for carrying a second semiconductor element including a plurality of second conductive structures, and for applying ultrasonic energy to the second semiconductor element to form tack bonds between ones of the plurality of second conductive structures and corresponding ones of the plurality of first conductive structures.
 24. The bonding system of claim 23 wherein, after forming the tack bonds, the bonding tool is configured to form completed bonds between the ones of the plurality of second conductive structures and corresponding ones of the plurality of first conductive structures.
 25. The bonding system of claim 24 wherein the bonding tool is a heated bonding tool, and the bonding tool applies heat to the second semiconductor element for forming the completed bonds.
 26. The bonding system of claim 23 further comprising a second bonding tool, wherein, after forming the tack bonds by the bonding tool, the second bonding tool is configured to form completed bonds between the ones of the plurality of second conductive structures and corresponding ones of the plurality of first conductive structures.
 27. The bonding system of claim 26 wherein the second bonding tool is a heated bonding tool, and the second bonding tool applies heat to the second semiconductor element for forming the completed bonds.
 28. The bonding system of claim 23 further comprising a gang bonding tool, wherein, after forming the tack bonds by the bonding tool, the gang bonding tool is configured to form completed bonds between a plurality of first semiconductor elements and a respective plurality of second semiconductor elements.
 29. The bonding system of claim 28 wherein the gang bonding tool is a heated bonding tool, and the gang bonding tool applies heat to the second semiconductor element for forming the completed bonds. 